In order to avoid radiation damage, coatings of low atomic number Z elements with lowest possible absorption and high reflectivity have been investigated. The graph shows the high performance of the total reflection mirrors comprising of carbon layers. The mirrors are prepared at GKSS using magnetron sputtering. Si substrates are coated with a single carbon layer which is 35 nm thick. In the whole range of applicational interest between 50 and 250 eV the layer shows a good reflectivity of more than 95%. This is similar to the optimal reflectivity of a simulated diamond layer. Mirrors can be produced in lengths of up to 150 cm.