XRF Analyzer Crystals
Optics for X-ray Fluorescence Spectrometry
- Mirrors for XRF, TXRF and EPMA

- Lower limits of detection for light elements
- Analysis of beryllium, boron and carbon
- with a 30% improvement at a quicker rate
- Client-specific special mirrors
Incoatec produces optics for X-ray Fluorescence devices. As analyzer crystals they select the required wavelength of the fluorescence radiation emitted by the sample. The optics, consisting of thin film multilayers, are used for analysing light elements such as Be, B, C, N up to Si. The energy of the fluorescence radiation is filtered by the multilayers up to 2keV. Our optics are used for example in XRF spectrometers made by Bruker AXS.
The table below shows the XRF measurement of boron radiation using both our and the former analyzer crystal. In comparison our multilayer increased the count rate by 50%. The calculated LLD is lowered by 30%. The measurements were taken within 100s at 4kW.
| Element | Sample | LLD [ppm] |
| Be | < 4% in Cu-bronze | 685 |
| B | < 4% in boron-phosphorus glasses | 220 |
| B | < 15% in colemanites | 185 |
| C | < 5% in cast iron | 76 |
We have achieved these results by developing a new type of multilayer. Our know-how in the field of material research and deposition technology was the key factor for this exciting development. We hold numerous patents for the new boron and carbon analyzer crystals (Pat. US 6628748, DE 10134266).
The analyzer crystals enable a distinct improvement in the lower limit of detection (LLD). The table shows results of measurements with our analyzer crystals in commercially available XRF spectrometers. The LLD values for light elements were calculated on the basis of typical calibration curves which were achieved by measuring different concentrations of the elements in the same kind of samples.
| Type | for Elements | and energy (eV) |
| XS-B | B, Be | 108-183 |
| XS-C | C | 277 |
| XS-N | N | 390 |
| XS-CEM | Al, Si, P, S | 1500-2500 |
The table portrays our range of X-ray optics for Fluorescence Spectrometry.
Our newest development, the XS-CEM analyzer crystal, is especially designed for applications in the cement industry. It has a resolution which is twice as high as the XS-55 and a reflectivity comparable to the PET. The main advantage of the XS-CEM is that its performance is not dependent on the temperature within the spectrometer. For a lot of applications the PET is no longer required!
In addition to these standard products we also develop special mirrors for specific applications. Please send us your ideas!